TEL Tokyo Electron Left Right Scan Arm Develop Process Station No Bath Lithius
Model No: Left Right DEV Scan Arm Assembly
DEV Develop Process Station
Removed from a TEL Tokyo Electron Clean Track Lithius System
Parts List (approximation, parts may vary)
Assembly Part No: 5087-400475-16, ARM(L) ASSY
5010-302038-11 BASE,SCAN 1
5010-304964-11 BASE 1
2910-414906-12 BLOCK,BELT 1
5010-400223-11 CLAMP,BELT 1
5010-401999-11 SENSOR SHUTTER 1
5010-304965-11 BASE,MOTOR 1
5010-308444-11 BRACKET 1
5010-303173-11 COVER(3) 1
5010-202195-11 COVER(LEFT) 1
5010-202206-11 COVER(RIGHT) 1
5010-308445-11 COVER(1) 1
5010-308446-11 ARM(LEFT) 1
5010-308447-11 ARM(RIGHT) 1
5010-402945-12 BRACKET,TUBE 1
5010-402934-11 STOPPER(LEFT) 1
5010-402933-11 STOPPER(RIGHT) 1
5010-402935-11 BLOCK,STOPPER 2
5010-404291-11 PLATE,AIRCHUCK 1
5010-405556-11 PLATE 1
047-003295-1 FLEXIBLE DUCT TKP0180-15R37-20L 1
026-005090-1 POSITIONING PIN SJPDA4-6 2
047-003566-1 #BRACKET TKP0180-15 PA 2
5024-000059-11 ACTUATOR LX-525A-5BD-30S 1
024-019979-1 AIR CYLINDER MHZ2-10C3M 1
028-003338-1 FITTING,TUBE M-5HL-4 1
028-006348-1 FITTING,TUBE EYB4-4-TR 1
017-002107-1 TUBE PN-4-4*2.5 YELLOW 1
020-000032-1 CAP SCREW M4*10 SUS304 8
020-000064-1 CAP SCREW M5*20 SUS304 4
020-001089-1 CAP SCREW M3*14 SUS304 5
020-000518-1 CAP SCREW M3*4 SUS304 10
020-000080-1 CAP SCREW M6*10 SUS304 4
020-000090-1 CAP SCREW M6*20 SUS304 4
020-001167-1 CAP SCREW M5*10 SUS304 2
020-000506-1 CAP SCREW M2.6*6 SUS304 4
020-000177-1 FLAT COUNTERSUNK HEAD SCREW M3*8 SUS304 2
020-000005-1 CAP SCREW M3*6 SUS304 4
020-000821-1 CAP SCREW M3*6 SUS304 W/SPR FLAT WASHER 16
5086-403317-11 ARM(L) ASSY 1
Assembly Part No: 5087-400476-16, ARM(R) ASSY
5010-302038-11 BASE,SCAN 1
5010-304964-11 BASE 1
2910-414906-12 BLOCK,BELT 1
5010-400223-11 CLAMP,BELT 1
5010-401999-11 SENSOR SHUTTER 1
5010-304965-11 BASE,MOTOR 1
5010-308444-11 BRACKET 1
5010-303173-11 COVER(3) 1
5010-202195-11 COVER(LEFT) 1
5010-202206-11 COVER(RIGHT) 1
5010-308445-11 COVER(1) 1
5010-308446-11 ARM(LEFT) 1
5010-308447-11 ARM(RIGHT) 1
5010-402945-12 BRACKET,TUBE 1
5010-402934-11 STOPPER(LEFT) 1
5010-402933-11 STOPPER(RIGHT) 1
5010-402935-11 BLOCK,STOPPER 2
5010-404291-11 PLATE,AIRCHUCK 1
5010-405556-11 PLATE 1
047-003295-1 FLEXIBLE DUCT TKP0180-15R37-20L 1
026-005090-1 POSITIONING PIN SJPDA4-6 2
047-003566-1 #BRACKET TKP0180-15 PA 2
5024-000059-11 ACTUATOR LX-525A-5BD-30S 1
024-019979-1 AIR CYLINDER MHZ2-10C3M 1
028-003338-1 FITTING,TUBE M-5HL-4 1
017-002107-1 TUBE PN-4-4*2.5 YELLOW 1
020-000032-1 CAP SCREW M4*10 SUS304 8
020-000064-1 CAP SCREW M5*20 SUS304 4
020-001089-1 CAP SCREW M3*14 SUS304 5
020-000518-1 CAP SCREW M3*4 SUS304 10
020-000080-1 CAP SCREW M6*10 SUS304 4
020-000090-1 CAP SCREW M6*20 SUS304 4
020-001167-1 CAP SCREW M5*10 SUS304 2
020-000506-1 CAP SCREW M2.6*6 SUS304 4
020-000177-1 FLAT COUNTERSUNK HEAD SCREW M3*8 SUS304 2
020-000005-1 CAP SCREW M3*6 SUS304 4
020-000821-1 CAP SCREW M3*6 SUS304 W/SPR&FLAT WASHER 16
5086-403314-11 ARM(R) ASSY 1
Assembly Part No: 5085-413053-11, NOZZLE TOP(NLD) ASSY
5010-101598-11 COVER(NLD-12),TOP 1
5010-402959-11 PIN 2
5004-100008-11 BLOCK,TOP (509510060811 1
5004-100009-11 HOLDER,TOP (509510060911 2
5004-400006-11 NUT(15A) (509510027011 2
2910-408085-11 NUT(3/8) 2
2910-419581-11 JOINT(3/8) 2
5010-402313-11 TUBE(3/8) 2
5010-407286-11 TUBE,FRANGE 2
5010-203560-11 BRACKET(R),NOZZLE 1
5010-203561-11 BRACKET(L),NOZZLE 1
027-002861-1 O-RING BUTYL AS568-170 BLACK 2
027-005360-1 O-RING KALREZ 6375UP S-10 BLACK 4
027-101580-1 O-RING NYTRYL S-18 BLACK 2
5017-000002-11 TUBE,TEFLON NO.9003-PL I*15A*1000*A 1
5017-000003-11 TUBE,TEFLON NO.9003-PL I*15A*1700*A 1
027-100998-1 O-RING NYTRYL S-16 BLACK 1
027-005358-1 O-RING KALREZ6375UP S-6 BLACK 2
020-000009-1 CAP SCREW M3*10 SUS304 25
020-000525-1 CAP SCREW M3*25 SUS304 4
020-000173-1 FLAT COUNTERSUNK HEAD SCREW M3*6 SUS304 4
020-000028-1 CAP SCREW M4*6 SUS304 8
032-000267-1 FLAT WASHER M4 SUS304 SMALL CIRCLE 8
020-001116-1 CAP SCREW M5*8 SUS304 4
020-001116-1 CAP SCREW M5*8 SUS304 4
Assembly Part No: 2985-494405-11, NOZZLE(NLD-12) ASSY
2985-492222-11 NOZZLE(NLD-12) ASSY (ASSY) 1
2985-494403-11 FIXED(NLD-12) 2
Assembly Part No: 5085-413053-11, NOZZLE TOP(NLD) ASSY
5010-101598-11 COVER(NLD-12),TOP 1
5010-402959-11 PIN 2
5004-100008-11 BLOCK,TOP (509510060811 1
5004-100009-11 HOLDER,TOP (509510060911 2
5004-400006-11 NUT(15A) (509510027011 2
2910-408085-11 NUT(3/8) 2
2910-419581-11 JOINT(3/8) 2
5010-402313-11 TUBE(3/8) 2
5010-407286-11 TUBE,FRANGE 2
5010-203560-11 BRACKET(R),NOZZLE 1
5010-203561-11 BRACKET(L),NOZZLE 1
027-002861-1 O-RING BUTYL AS568-170 BLACK 2
027-005360-1 O-RING KALREZ 6375UP S-10 BLACK 4
027-101580-1 O-RING NYTRYL S-18 BLACK 2
5017-000002-11 TUBE,TEFLON NO.9003-PL I*15A*1000*A 1
5017-000003-11 TUBE,TEFLON NO.9003-PL I*15A*1700*A 1
027-100998-1 O-RING NYTRYL S-16 BLACK 1
027-005358-1 O-RING KALREZ6375UP S-6 BLACK 2
020-000009-1 CAP SCREW M3*10 SUS304 25
020-000525-1 CAP SCREW M3*25 SUS304 4
020-000173-1 FLAT COUNTERSUNK HEAD SCREW M3*6 SUS304 4
020-000028-1 CAP SCREW M4*6 SUS304 8
032-000267-1 FLAT WASHER M4 SUS304 SMALL CIRCLE 8
020-001116-1 CAP SCREW M5*8 SUS304 4
Assembly Part No: 5085-413053-11, NOZZLE TOP(NLD) ASSY
5010-101598-11 COVER(NLD-12),TOP 1
5010-402959-11 PIN 2
5004-100008-11 BLOCK,TOP (509510060811 1
5004-100009-11 HOLDER,TOP (509510060911 2
5004-400006-11 NUT(15A) (509510027011 2
2910-408085-11 NUT(3/8) 2
2910-419581-11 JOINT(3/8) 2
5010-402313-11 TUBE(3/8) 2
5010-407286-11 TUBE,FRANGE 2
5010-203560-11 BRACKET(R),NOZZLE 1
5010-203561-11 BRACKET(L),NOZZLE 1
027-002861-1 O-RING BUTYL AS568-170 BLACK 2
027-005360-1 O-RING KALREZ 6375UP S-10 BLACK 4
027-101580-1 O-RING NYTRYL S-18 BLACK 2
5017-000002-11 TUBE,TEFLON NO.9003-PL I*15A*1000*A 1
5017-000003-11 TUBE,TEFLON NO.9003-PL I*15A*1700*A 1
027-100998-1 O-RING NYTRYL S-16 BLACK 1
027-005358-1 O-RING KALREZ6375UP S-6 BLACK 2
020-000009-1 CAP SCREW M3*10 SUS304 25
020-000525-1 CAP SCREW M3*25 SUS304 4
020-000173-1 FLAT COUNTERSUNK HEAD SCREW M3*6 SUS304 4
020-000028-1 CAP SCREW M4*6 SUS304 8
032-000267-1 FLAT WASHER M4 SUS304 SMALL CIRCLE 8
020-001116-1 CAP SCREW M5*8 SUS304 4
Assembly Part No: 2985-494405-11, NOZZLE(NLD-12) ASSY
2985-492222-11 NOZZLE(NLD-12) ASSY (ASSY) 1
2985-494403-11 FIXED(NLD-12) 2
Assembly Part No: 5085-413053-11, NOZZLE TOP(NLD) ASSY
5010-101598-11 COVER(NLD-12),TOP 1
5010-402959-11 PIN 2
5004-100008-11 BLOCK,TOP (509510060811 1
5004-100009-11 HOLDER,TOP (509510060911 2
5004-400006-11 NUT(15A) (509510027011 2
2910-408085-11 NUT(3/8) 2
2910-419581-11 JOINT(3/8) 2
5010-402313-11 TUBE(3/8) 2
5010-407286-11 TUBE,FRANGE 2
5010-203560-11 BRACKET(R),NOZZLE 1
010-203561-11 BRACKET(L),NOZZLE 1
027-002861-1 O-RING BUTYL AS568-170 BLACK 2
027-005360-1 O-RING KALREZ 6375UP S-10 BLACK 4
027-101580-1 O-RING NYTRYL S-18 BLACK 2
5017-000002-11 TUBE,TEFLON NO.9003-PL I*15A*1000*A 1
5017-000003-11 TUBE,TEFLON NO.9003-PL I*15A*1700*A 1
027-100998-1 O-RING NYTRYL S-16 BLACK 1
027-005358-1 O-RING KALREZ6375UP S-6 BLACK 2
020-000009-1 CAP SCREW M3*10 SUS304 25
020-000525-1 CAP SCREW M3*25 SUS304 4
020-000173-1 FLAT COUNTERSUNK HEAD SCREW M3*6 SUS304 4
020-000028-1 CAP SCREW M4*6 SUS304 8
032-000267-1 FLAT WASHER M4 SUS304 SMALL CIRCLE 8
020-001116-1 CAP SCREW M5*8 SUS304 4
Assembly Part No: 5085-412389-11, BASE(SCAN) ASSY
5010-203421-11 BASE(SCAN) 1
5010-405439-11 COVER 1
5010-404421-11 BLOCK,ADJUST 2
5018-000005-11 LM GUIDE SHS15V1FEM+620LF-2 2
020-000032-1 CAP SCREW M4*10 SUS304 8
020-000169-1 FLAT COUNTERSUNK HEAD SCREW M3*4 SUS30 4
020-001093-1 CAP SCREW M4*14 SUS304 22
033-000143-1 NUT M4 SUS304 3-TYPE 2
020-000028-1 CAP SCREW M4*6 SUS304 2
032-000058-1 SPRING WASHER M4 SUS304 2
032-000267-1 FLAT WASHER M4 SUS304 SMALL CIRCLE 2
047-000534-1 CABLE MOUNT TA1S8-M 2
020-000005-1 CAP SCREW M3*6 SUS304 4
Assembly Part No: 5087-402854-11, MOTOR(L) ASSY
5010-405555-11 BRACKET 1
5010-403044-11 SHAFT 1
2902-400093-11 PULLEY(S) 1
2902-400140-11 PULLEY(N) 1
2902-400139-11 PULLEY(M) 1
022-100726-1 BEARING F688ZZ 2
023-003035-1 BELT,TIMING B60S3M1299G 1
023-003036-1 BELT,TIMING B100S3M162G 1
020-002913-1 CAP SCREW M4*8 SUS304 W/SPR & FLAT WASHER 2
020-001126-1 SET SCREW M4*5 SUS304 6
021-100309-1 E-RING ETW-6 SUS304 2
020-000005-1 CAP SCREW M3*6 SUS304 4
5086-403310-11 MOTOR(L) ASSY 1
Assembly Part No: 5085-404442-12, PULLEY ASSY
5010-405325-11 BLOCK,ADJUST 1
5010-400218-11 SHAFT 1
2902-400093-11 PULLEY(S) 1
5010-404123-11 BLOCK,TENSION 1
022-100726-1 BEARING F688ZZ 2
020-002913-1 CAP SCREW M4*8 SUS304 W/SPR & FLAT WASHER 1
020-000009-1 CAP SCREW M3*10 SUS304 2
020-001093-1 CAP SCREW M4*14 SUS304 1
033-000143-1 NUT M4 SUS304 3-TYPE 1
021-100309-1 E-RING ETW-6 SUS304 2
020-001126-1 SET SCREW M4*5 SUS304 2
This TEL Tokyo Electron Left Right Scan Arm is used working surplus. The physical condition is good, but there are signs of previous use and handling.
Sale Details
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Item Condition: Used Working, 90 Day Warranty
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Estimated Packed Shipping Dimensions: L x W x H = 36"x24"x14" @ 50 lbs.
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Only items pictured are included: If a part is not pictured, or mentioned above, then it is not included in the sale. Pictured test equipment is not included or available for sale.
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For items with multiple quantities: The pictured item is not necessarily the one that will be sent. Serial numbers or country of manufacture may vary.
- Lister 31
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